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Abstract Buckling is a structural phenomenon that can induce significant motion with minimal input variation. Electrothermal bimorphs, with their simple input and compact design, can leverage out-of-plane buckling motion for a broad range of applications. This paper presents the development of analytical electrothermal and structural models for such bimorphs. The electrothermal model calculates the temperature distribution within the bimorph caused by electrothermal heating, providing a 2D explicit analytical expression for estimating temperature along the bimorph’s length and cross-section. Nonhomogeneous heating leads to varying strains, which induce axial forces and moments along the bimorph’s neutral plane, varying with thermal expansion. The structural model derives the governing equation of deformation for the bimorph by analyzing internal strains and stresses resulting from deformation, electrothermal heating, and residual stresses. An analytical solution for deflection is obtained, incorporating infinite sums of heating and buckling modes, with closed-form equivalent expressions when possible. The bimorph’s behavior under different scenarios of residual stresses and electrothermal heating is elucidated based on the analytical model. Comparisons with finite element simulations demonstrated excellent agreement, highlighting the high accuracy of the proposed models. 

Abstract Subwavelength diffractive optics known as meta-optics have demonstrated the potential to significantly miniaturize imaging systems. However, despite impressive demonstrations, most meta-optical imaging systems suffer from strong chromatic aberrations, limiting their utilities. Here, we employ inverse-design to create broadband meta-optics operating in the long-wave infrared (LWIR) regime (8-12μm). Via a deep-learning assisted multi-scale differentiable framework that links meta-atoms to the phase, we maximize the wavelength-averaged volume under the modulation transfer function (MTF) surface of the meta-optics. Our design framework merges local phase-engineering via meta-atoms and global engineering of the scatterer within a single pipeline. We corroborate our design by fabricating and experimentally characterizing all-silicon LWIR meta-optics. Our engineered meta-optic is complemented by a simple computational backend that dramatically improves the quality of the captured image. We experimentally demonstrate a six-fold improvement of the wavelength-averaged Strehl ratio over the traditional hyperboloid metalens for broadband imaging. 

Abstract Light’s ability to perform massive linear operations in parallel has recently inspired numerous demonstrations of optics-assisted artificial neural networks (ANN). However, a clear system-level advantage of optics over purely digital ANN has not yet been established. While linear operations can indeed be optically performed very efficiently, the lack of nonlinearity and signal regeneration require high-power, low-latency signal transduction between optics and electronics. Additionally, a large power is needed for lasers and photodetectors, which are often neglected in the calculation of the total energy consumption. Here, instead of mapping traditional digital operations to optics, we co-designed a hybrid optical-digital ANN, that operates on incoherent light, and is thus amenable to operations under ambient light. Keeping the latency and power constant between a purely digital ANN and a hybrid optical-digital ANN, we identified a low-power/latency regime, where an optical encoder provides higher classification accuracy than a purely digital ANN. We estimate our optical encoder enables ∼10 kHz rate operation of a hybrid ANN with a power of only 23 mW. However, in that regime, the overall classification accuracy is lower than what is achievable with higher power and latency. Our results indicate that optics can be advantageous over digital ANN in applications, where the overall performance of the ANN can be relaxed to prioritize lower power and latency. 

Abstract Miniature varifocal lenses are crucial for many applications requiring compact optical systems. Here, utilizing electro-mechanically actuated 0.5-mm aperture infrared Alvarez meta-optics, we demonstrate 3.1 mm (200 diopters) focal length tuning with an actuation voltage below 40 V. This constitutes the largest focal length tuning in any low-power electro-mechanically actuated meta-optic, enabled by the high energy density in comb-drive actuators producing large displacements at relatively low voltage. The demonstrated device is produced by a novel nanofabrication process that accommodates meta-optics with a larger aperture and has improved alignment between meta-optics via flip-chip bonding. The whole fabrication process is CMOS compatible and amenable to high-throughput manufacturing. 

The combination of photonic integrated circuits and free-space metaoptics has the ability to untie technological knots that require advanced light manipulation due to their conjoined ability to achieve strong light–matter interaction via wave-guiding light over a long distance and shape them via large space-bandwidth product. Rapid prototyping of such a compound system requires component interchangeability. This represents a functional challenge in terms of fabrication and alignment of high-performance optical systems. Here, we report a flexible and interchangeable interface between a photonic integrated circuit and the free space using an array of low-loss metaoptics and demonstrate multifunctional beam shaping at a wavelength of 780 nm. We show that robust and high-fidelity operation of the designed optical functions can be achieved without prior precise characterization of the free-space input nor stringent alignment between the photonic integrated chip and the metaoptics chip. A diffraction limited spot of ∼3 μm for a hyperboloid metalens of numerical aperture 0.15 is achieved despite an input Gaussian elliptical deformation of up to 35% and misalignments of the components of up to 20 μm. A holographic image with a peak signal-to-noise ratio of >10 dB is also reported.